Title :
Epitaxial Integrated E-dE Silicon Detector with a Buried Low-Resistive Diffused Layer
Author :
Kim, C. ; Kim, H. ; Kikuchi, K. ; Husimi, K. ; Ohkawa, S. ; Fuchi, Y.
Author_Institution :
Department of Electronics Engineering, Korea University, Kodaira, Tokyo 187, Japan
Keywords :
Detectors; Diodes; Etching; Fabrication; Impurities; Ion implantation; Silicon; Substrates; Telescopes; Wire;
Journal_Title :
Nuclear Science, IEEE Transactions on
DOI :
10.1109/TNS.1980.4330836
