Equivalent circuit analysis of an RF integrated ferromagnetic inductor

Author

Kuribara, Takashi ; Yamaguchi, Masahiro ; Arai, Ken-Ichi

Author_Institution

Res. Inst. of Electr. Commun., Tohoku Univ., Sendai, Japan

Volume

38

Issue

5

fYear

2002

fDate

9/1/2002 12:00:00 AM

Firstpage

3159

Lastpage

3161

Abstract

An RF integrated air-core inductor and a ferromagnetic thin-film inductor having a ferromagnetic film on top of the spiral have been microfabricated. An equivalent circuit of the RF integrated spiral inductor with ferromagnetic film has been derived to analyze the contribution of the permeability of the magnetic film to the inductance of the inductor. The scattering parameters (S-parameters) have been measured to derive the equivalent circuit parameters of the inductors. Using the amorphous Co₈₅Nb₁₂Zr₃ film with slots, the inductance increased and the capacitance between the magnetic film and the coil and between the magnetic film and the ground could be neglected up to 5 GHz.

Keywords

S-parameters; amorphous magnetic materials; cobalt alloys; equivalent circuits; ferromagnetic materials; inductors; magnetic permeability; magnetic thin film devices; niobium alloys; zirconium alloys; 5 GHz; Co₈₅Nb₁₂Zr₃; Co₈₅Nb₁₂Zr₃ amorphous film; RF integrated spiral inductor; air core inductor; equivalent circuit; ferromagnetic thin film inductor; magnetic permeability; microfabrication process; scattering parameters; Circuit analysis; Equivalent circuits; Inductance; Magnetic analysis; Magnetic films; Permeability; Radio frequency; Scattering parameters; Spirals; Thin film inductors;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/TMAG.2002.802400

Filename

1042483