Title :
Equivalent circuit analysis of an RF integrated ferromagnetic inductor
Author :
Kuribara, Takashi ; Yamaguchi, Masahiro ; Arai, Ken-Ichi
Author_Institution :
Res. Inst. of Electr. Commun., Tohoku Univ., Sendai, Japan
fDate :
9/1/2002 12:00:00 AM
Abstract :
An RF integrated air-core inductor and a ferromagnetic thin-film inductor having a ferromagnetic film on top of the spiral have been microfabricated. An equivalent circuit of the RF integrated spiral inductor with ferromagnetic film has been derived to analyze the contribution of the permeability of the magnetic film to the inductance of the inductor. The scattering parameters (S-parameters) have been measured to derive the equivalent circuit parameters of the inductors. Using the amorphous Co85Nb12Zr3 film with slots, the inductance increased and the capacitance between the magnetic film and the coil and between the magnetic film and the ground could be neglected up to 5 GHz.
Keywords :
S-parameters; amorphous magnetic materials; cobalt alloys; equivalent circuits; ferromagnetic materials; inductors; magnetic permeability; magnetic thin film devices; niobium alloys; zirconium alloys; 5 GHz; Co85Nb12Zr3; Co85Nb12Zr3 amorphous film; RF integrated spiral inductor; air core inductor; equivalent circuit; ferromagnetic thin film inductor; magnetic permeability; microfabrication process; scattering parameters; Circuit analysis; Equivalent circuits; Inductance; Magnetic analysis; Magnetic films; Permeability; Radio frequency; Scattering parameters; Spirals; Thin film inductors;
Journal_Title :
Magnetics, IEEE Transactions on
DOI :
10.1109/TMAG.2002.802400
