Title :
Uni-travelling-carrier photodiode module with bandwidth of 80 GHz
Author :
Muramoto, Y. ; Hirota, Y. ; Yoshino, K. ; Ito, H. ; Ishibashi, T.
Author_Institution :
NTT Photonics Labs., NTT Corp., Atsugi, Japan
Abstract :
A uni-travelling-carrier photodiode module having a 1 mm
Keywords :
etching; frequency response; integrated optoelectronics; metallisation; modules; optical receivers; photodetectors; photodiodes; photolithography; semiconductor device packaging; 10 mA; 80 GHz; average photocurrent; butterfly package; connector output port; edge-illuminated refracting facet; frequency response; high-bit-rate optical communications; high-speed photodetectors; liftoff metallisation; photolithography; photoreceivers; quartz CPW; responsivity; unitravelling-carrier photodiode module; wet chemical etching;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20031158
