Title :
Design of Bragg Grating Sensors Based on Submicrometer Optical Rib Waveguides in SOI
Author :
Passaro, Vittorio M N ; Loiacono, Renzo ; Amico, Giuseppe D. ; Leonardis, Francesco De
Author_Institution :
Dipt. di Elettrotec. ed Elettron., Politec. di Bari, Bari
Abstract :
A submicrometer integrated optical sensor based on Bragg gratings in silicon-on-insulator technology is theoretically proposed in this paper. The grating analysis is performed using a mixed numerical approach based on the finite-element method and coupled mode theory. The possibility to use third-order instead of first-order grating is discussed and performances compared, thus overcoming fabrication problems associated to submicrometer scale features. A detection limit of approximately 10-4 refractive index unit has been calculated for a 173-mum-long grating. Strategies to further improve this value have been discussed too. Finally, fabrication tolerances influence on optimized gratings has been investigated.
Keywords :
Bragg gratings; coupled mode analysis; finite element analysis; integrated optics; optical fabrication; optical sensors; optical waveguides; rib waveguides; silicon-on-insulator; Bragg grating sensors; SOI; coupled mode theory; finite-element method; integrated optical sensor; optical fabrication; refractive index; silicon-on-insulator; submicrometer optical rib waveguides; Bragg gratings; Coupled mode analysis; Optical design; Optical refraction; Optical sensors; Optical variables control; Optical waveguide theory; Optical waveguides; Performance analysis; Silicon on insulator technology; Bragg grating; integrated optics; optical sensors; silicon photonics; silicon-on-insulator (SOI);
Journal_Title :
Sensors Journal, IEEE
DOI :
10.1109/JSEN.2008.929068
