Eddy-current microsensor based on thin-film technology

Author

Gatzen, Hans H. ; Andreeva, Ekaterina ; Iswahjudi, Heri

Author_Institution

Inst. for Microtechnology, Hanover Univ., Germany

Volume

38

Issue

5

fYear

2002

fDate

9/1/2002 12:00:00 AM

Firstpage

3368

Lastpage

3370

Abstract

An eddy-current microsensor for proximity measurement was developed. To achieve an optimal design, the sensor was modeled using the finite-element method. By studying the sensor response, but staying within the technological boundaries, an optimal design was reached. The sensor had a soft-magnetic core and separate excitation and pickup coils. The fabrication technologies included electroplating for core and coil and sputter deposition for insulation and seed layers. Photoresists were used for creating micromolds for electroplating both core and coil, as well as for sensor embedding. Completed sensor samples had a frequency range of 100 kHz to 2 MHz and proved their capability of performing proximity measurement.

Keywords

coils; eddy current testing; eddy currents; electroplating; finite element analysis; magnetic cores; microsensors; spatial variables measurement; sputter deposition; 100 kHz to 2 MHz; eddy-current microsensor; electroplating; excitation coils; finite-element method; insulation layers; micromolds; optimal design; photoresists; pickup coils; proximity measurement; seed layers; sensor embedding; sensor response; soft-magnetic core; sputter deposition; thin-film technology; Coils; Fabrication; Finite element methods; Frequency; Insulation; Microsensors; Performance evaluation; Resists; Sputtering; Transistors;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/TMAG.2002.802289

Filename

1042555