• DocumentCode
    850462
  • Title

    Simulations of Cascade Damage in Silicon

  • Author

    Mueller, G.P. ; Guenzer, C.S.

  • Author_Institution
    Naval Research Laboratory Washington, D. C. 20375
  • Volume
    27
  • Issue
    6
  • fYear
    1980
  • Firstpage
    1474
  • Lastpage
    1477
  • Abstract
    In an effort to better understand radiation damage to electronic materials, we use the binary-collision simulation code MARLOWE to model displacement cascades in silicon. We examine the average number of displacements produced by knock-on atoms as a function of their energy. The resulting vacancy-interstitial pairs are classified according to separation radius. We also examine a few particular cases of 100 keV cascades in silicon in order to highlight the importance that channeling has on the shape of displacement cascades.
  • Keywords
    Atomic measurements; Computational modeling; Computer simulation; Electronic components; Laboratories; Lattices; Shape; Silicon; Temperature; Tree data structures;
  • fLanguage
    English
  • Journal_Title
    Nuclear Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9499
  • Type

    jour

  • DOI
    10.1109/TNS.1980.4331054
  • Filename
    4331054