DocumentCode
850462
Title
Simulations of Cascade Damage in Silicon
Author
Mueller, G.P. ; Guenzer, C.S.
Author_Institution
Naval Research Laboratory Washington, D. C. 20375
Volume
27
Issue
6
fYear
1980
Firstpage
1474
Lastpage
1477
Abstract
In an effort to better understand radiation damage to electronic materials, we use the binary-collision simulation code MARLOWE to model displacement cascades in silicon. We examine the average number of displacements produced by knock-on atoms as a function of their energy. The resulting vacancy-interstitial pairs are classified according to separation radius. We also examine a few particular cases of 100 keV cascades in silicon in order to highlight the importance that channeling has on the shape of displacement cascades.
Keywords
Atomic measurements; Computational modeling; Computer simulation; Electronic components; Laboratories; Lattices; Shape; Silicon; Temperature; Tree data structures;
fLanguage
English
Journal_Title
Nuclear Science, IEEE Transactions on
Publisher
ieee
ISSN
0018-9499
Type
jour
DOI
10.1109/TNS.1980.4331054
Filename
4331054
Link To Document