DocumentCode
850792
Title
Optical transmission of polymer pillars for chip I/O optical interconnections
Author
Bakir, M.S. ; Gaylord, T.K. ; Ogunsola, O.O. ; Glytsis, E.N. ; Meindl, J.D.
Author_Institution
Microelectron. Res. Center, Georgia Inst. of Technol., Atlanta, GA, USA
Volume
16
Issue
1
fYear
2004
Firstpage
117
Lastpage
119
Abstract
In the pursuit of high-density wafer-level input-output optical interconnections, microscopic polymer pillars have recently been fabricated. The optical performance of these pillars is critical for their potential application to gigascale integration. In the present work, the optical transmission of these pillars is analyzed and measured. It is shown that these polymer pillars act as precision many-moded waveguides, thus, verifying the cross-sectional uniformity, smoothness of surfaces, and optical quality of the material.
Keywords
Hankel transforms; light transmission; mode matching; optical fabrication; optical interconnections; optical planar waveguides; optical polymers; photolithography; spin coating; Fourier-Bessel transform; Hankel transform; air cladding; cross-sectional uniformity; glass substrates; high-density wafer-level input-output interconnections; microscopic polymer pillars; mode-matching; optical interconnections; optical performance; optical quality; optical transmission; photolithographically patterned; polynorbornene photopolymer; precision many-moded waveguides; semiconductor chips; soft baking; spin coated; surface smoothness; Glass; Optical interconnections; Optical microscopy; Optical noise; Optical polymers; Optical refraction; Optical surface waves; Optical variables control; Optical waveguides; Testing;
fLanguage
English
Journal_Title
Photonics Technology Letters, IEEE
Publisher
ieee
ISSN
1041-1135
Type
jour
DOI
10.1109/LPT.2003.819398
Filename
1255970
Link To Document