DocumentCode :
850792
Title :
Optical transmission of polymer pillars for chip I/O optical interconnections
Author :
Bakir, M.S. ; Gaylord, T.K. ; Ogunsola, O.O. ; Glytsis, E.N. ; Meindl, J.D.
Author_Institution :
Microelectron. Res. Center, Georgia Inst. of Technol., Atlanta, GA, USA
Volume :
16
Issue :
1
fYear :
2004
Firstpage :
117
Lastpage :
119
Abstract :
In the pursuit of high-density wafer-level input-output optical interconnections, microscopic polymer pillars have recently been fabricated. The optical performance of these pillars is critical for their potential application to gigascale integration. In the present work, the optical transmission of these pillars is analyzed and measured. It is shown that these polymer pillars act as precision many-moded waveguides, thus, verifying the cross-sectional uniformity, smoothness of surfaces, and optical quality of the material.
Keywords :
Hankel transforms; light transmission; mode matching; optical fabrication; optical interconnections; optical planar waveguides; optical polymers; photolithography; spin coating; Fourier-Bessel transform; Hankel transform; air cladding; cross-sectional uniformity; glass substrates; high-density wafer-level input-output interconnections; microscopic polymer pillars; mode-matching; optical interconnections; optical performance; optical quality; optical transmission; photolithographically patterned; polynorbornene photopolymer; precision many-moded waveguides; semiconductor chips; soft baking; spin coated; surface smoothness; Glass; Optical interconnections; Optical microscopy; Optical noise; Optical polymers; Optical refraction; Optical surface waves; Optical variables control; Optical waveguides; Testing;
fLanguage :
English
Journal_Title :
Photonics Technology Letters, IEEE
Publisher :
ieee
ISSN :
1041-1135
Type :
jour
DOI :
10.1109/LPT.2003.819398
Filename :
1255970
Link To Document :
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