• DocumentCode
    850792
  • Title

    Optical transmission of polymer pillars for chip I/O optical interconnections

  • Author

    Bakir, M.S. ; Gaylord, T.K. ; Ogunsola, O.O. ; Glytsis, E.N. ; Meindl, J.D.

  • Author_Institution
    Microelectron. Res. Center, Georgia Inst. of Technol., Atlanta, GA, USA
  • Volume
    16
  • Issue
    1
  • fYear
    2004
  • Firstpage
    117
  • Lastpage
    119
  • Abstract
    In the pursuit of high-density wafer-level input-output optical interconnections, microscopic polymer pillars have recently been fabricated. The optical performance of these pillars is critical for their potential application to gigascale integration. In the present work, the optical transmission of these pillars is analyzed and measured. It is shown that these polymer pillars act as precision many-moded waveguides, thus, verifying the cross-sectional uniformity, smoothness of surfaces, and optical quality of the material.
  • Keywords
    Hankel transforms; light transmission; mode matching; optical fabrication; optical interconnections; optical planar waveguides; optical polymers; photolithography; spin coating; Fourier-Bessel transform; Hankel transform; air cladding; cross-sectional uniformity; glass substrates; high-density wafer-level input-output interconnections; microscopic polymer pillars; mode-matching; optical interconnections; optical performance; optical quality; optical transmission; photolithographically patterned; polynorbornene photopolymer; precision many-moded waveguides; semiconductor chips; soft baking; spin coated; surface smoothness; Glass; Optical interconnections; Optical microscopy; Optical noise; Optical polymers; Optical refraction; Optical surface waves; Optical variables control; Optical waveguides; Testing;
  • fLanguage
    English
  • Journal_Title
    Photonics Technology Letters, IEEE
  • Publisher
    ieee
  • ISSN
    1041-1135
  • Type

    jour

  • DOI
    10.1109/LPT.2003.819398
  • Filename
    1255970