Vertically integrated SOI circuits for low-power and high-performance applications

Vertical integration offers numerous advantages over conventional structures. By stacking multiple-material layers to form double gate transistors and by stacking multiple device layers to form multidevice-layer integration, vertical integration can emerge as the technology of choice for low-power and high-performance integration. In this paper, we demonstrate that the vertical integration can achieve better circuit performance and power dissipation due to improved device characteristics and reduced interconnect complexity and delay. The structures of vertically integrated double gate (DG) silicon-on-insulator (SOI) devices and circuits, and corresponding multidevice-layer (3-D) SOI circuits are presented; a general double-gate SOI model is provided for the study of symmetric and asymmetric SOI CMOS circuits; circuit speed, power dissipation of double-gate dynamic threshold (DGDT) SOI circuits are investigated and compared to single gate (SG) SOI circuits; potential 3-D SOI circuits are laid out. Chip area, layout complexity, process cost, and impact on circuit performance are studied. Results show that DGDT SOI CMOS circuits provide the best power-delay product, which makes them very attractive for low-voltage low-power applications. Multidevice-layer integration achieves performance improvement by shortening the interconnects. Results indicate that up to 40% of interconnect performance improvements can be expected for a 4-device-layer integration.