Title :
Focusing grating coupler for blue laser light
Author :
Yeungjoon Sohn ; Yongwoo Park ; Dongwoo Suh ; Ryu, Han-Youl ; Mun Cheol Paek
Author_Institution :
Electron. & Telecommun. Res. Inst., Daejeon, South Korea
Abstract :
A focusing grating coupler (FGC) for use with a blue laser of 400-nm wavelength as a light source was fabricated for the first time. The FGC was designed to have a numerical aperture of 0.48 and a minimum period of 0.2 μm when the focal length and the grating area were 900 μm and 1×1 mm2, respectively. Grating pattern of minimum line of 0.1 μm was fabricated on a waveguide based on the boron phosphor-silicate glass material by electron-beam lithography process using the vector scan method. The spot size at the full width (1/e2) was measured as 0.92 and 0.85μm in x and y directions and was nearly the same as the diffraction limit.
Keywords :
borosilicate glasses; diffraction gratings; electron beam lithography; optical couplers; optical disc storage; optical fabrication; optical focusing; optical glass; optical planar waveguides; phosphosilicate glasses; B2O3-P2O5-SiO2; BPSG; BPSG waveguide layers; blue laser light; diffraction limit; electron-beam lithography; fine grating patterns; focusing grating coupler; grating pattern; integrated pickup head; optical beam focusing; optical device fabrication; optical memories; optical planar waveguide couplers; vector scan method; Apertures; Boron; Diffraction gratings; Diode lasers; Fabrication; Glass; Light sources; Optical coupling; Optical devices; Optical waveguides;
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2003.818904
