DocumentCode
85144
Title
Doping-Less Tunnel Field Effect Transistor: Design and Investigation
Author
Kumar, M.J. ; Janardhanan, S.
Author_Institution
Dept. of Electr. Eng., Indian Inst. of Technol., New Delhi, New Delhi, India
Volume
60
Issue
10
fYear
2013
fDate
Oct. 2013
Firstpage
3285
Lastpage
3290
Abstract
Using calibrated simulations, we report a detailed study of the doping-less tunnel field effect transistor (TFET) on a thin intrinsic silicon film using charge plasma concept. Without the need for any doping, the source and drain regions are formed using the charge plasma concept by choosing appropriate work functions for the source and drain metal electrodes. Our results show that the performance of the doping-less TFET is similar to that of a corresponding doped TFET. The doping-less TFET is expected to be free from problems associated with random dopant fluctuations. Furthermore, fabrication of doping-less TFET does not require a high-temperature doping/annealing processes and therefore cuts down the thermal budget, opening up possibilities for fabricating TFETs on single crystal silicon-on-glass substrates formed by wafer scale epitaxial transfer.
Keywords
elemental semiconductors; field effect transistors; semiconductor thin films; silicon; tunnel transistors; Si; calibrated simulations; charge plasma concept; doping-less TFET fabrication; doping-less tunnel field effect transistor; drain metal electrodes; drain regions; random dopant fluctuations; single crystal silicon-on-glass substrates; source metal electrodes; source regions; thermal budget; thin intrinsic silicon film; wafer scale epitaxial transfer; work functions; Charge carrier processes; Doping; Logic gates; Semiconductor process modeling; Silicon; Transistors; Tunneling; Band-to-band tunneling; charge-plasma; simulation; technology computer aided design (TCAD); tunnel field effect transistor (TFET);
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/TED.2013.2276888
Filename
6581869
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