DocumentCode
851724
Title
Nanoscale PtSi Tips for Conducting Probe Technologies
Author
Bhaskaran, Harish ; Sebastian, Abu ; Despont, Michel
Author_Institution
Zurich Res. Lab., IBM, Ruschlikon
Volume
8
Issue
1
fYear
2009
Firstpage
128
Lastpage
131
Abstract
A method to improve the conduction and wear properties of nanometric conducting tips by forming silicides of Pt at the tip apex is presented. Tips with PtSi apexes are fabricated in conjunction with standard Si tips. Wear measurements are carried out on both tip types of similar geometries, and a one-on-one comparison between Si and PtSi at the nanoscale is shown for the first time. Both the wear properties on tetrahedral amorphous carbon and the conduction on Au of the PtSi tip apexes are shown to be superior to the Si tips.
Keywords
amorphous state; atomic force microscopy; carbon; electrical conductivity; elemental semiconductors; gold; nanofabrication; nanostructured materials; platinum alloys; silicon; silicon alloys; wear; AFM; Au; C; PtSi-Au; PtSi-C; Si-Au; Si-C; conducting probe technology; nanometric conducting tips; nanoscale conduction; silicides; tetrahedral amorphous carbon; wear; Conducting probes; nanoscale conduction; nanoscale wear;
fLanguage
English
Journal_Title
Nanotechnology, IEEE Transactions on
Publisher
ieee
ISSN
1536-125X
Type
jour
DOI
10.1109/TNANO.2008.2005199
Filename
4610965
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