DocumentCode
852313
Title
Record tuning range of InP-based multiple air-gap MOEMS filter
Author
Daleiden, J. ; Rangelov, V. ; Irmer, S. ; Römer, F. ; Strassner, M. ; Prott, C. ; Tarraf, A. ; Hillmer, H.
Author_Institution
Inst. of Microstructure Technol. & Analytics, Kassel Univ., Germany
Volume
38
Issue
21
fYear
2002
fDate
10/10/2002 12:00:00 AM
Firstpage
1270
Lastpage
1271
Abstract
Continuously tunable Fabry-Perot filters based on multiple InP/air-gap MOEMS technology are presented. Record wavelength tuning >112 nm with an actuation voltage of only 5 V is demonstrated. The FWHM remains constant over the entire tuning range. The stopband covers both the second and third optical telecommunication window (1250-1800 nm).
Keywords
III-V semiconductors; indium compounds; micro-optics; micromechanical devices; optical communication equipment; optical filters; optical tuning; 1250 to 1800 nm; 5 V; FWHM; InP; InP-based multiple air-gap MOEMS filter; actuation voltage; continuously tunable Fabry-Perot filters; micro opto electromechanical system; optical filters; second optical telecommunication window; third optical telecommunication window; tuning range; wavelength tuning;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:20020872
Filename
1043714
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