Title :
Record tuning range of InP-based multiple air-gap MOEMS filter
Author :
Daleiden, J. ; Rangelov, V. ; Irmer, S. ; Römer, F. ; Strassner, M. ; Prott, C. ; Tarraf, A. ; Hillmer, H.
Author_Institution :
Inst. of Microstructure Technol. & Analytics, Kassel Univ., Germany
fDate :
10/10/2002 12:00:00 AM
Abstract :
Continuously tunable Fabry-Perot filters based on multiple InP/air-gap MOEMS technology are presented. Record wavelength tuning >112 nm with an actuation voltage of only 5 V is demonstrated. The FWHM remains constant over the entire tuning range. The stopband covers both the second and third optical telecommunication window (1250-1800 nm).
Keywords :
III-V semiconductors; indium compounds; micro-optics; micromechanical devices; optical communication equipment; optical filters; optical tuning; 1250 to 1800 nm; 5 V; FWHM; InP; InP-based multiple air-gap MOEMS filter; actuation voltage; continuously tunable Fabry-Perot filters; micro opto electromechanical system; optical filters; second optical telecommunication window; third optical telecommunication window; tuning range; wavelength tuning;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20020872
