Title :
Preparation method and RF behaviour of Nb/sub 3/Sn thin films obtained by bronze process
Author :
Durante, M.J. ; Musenich, R. ; Parodi, R. ; Gemme, G. ; Fabbricatore, P. ; Zhang, B. ; Gambardella, U. ; Boffa, V. ; Bottino, C. ; Buscaglia, V.
Author_Institution :
Istituto Nazionale di Fisica Nucl., Genova, Italy
fDate :
6/1/1995 12:00:00 AM
Abstract :
Aiming to application in RF devices, a method to obtain Nb/sub 3/Sn thin films, combining sputtering technique and bronze process, has been developed. A niobium film, 300-500 nm thick, is deposited by sputtering onto a 7 at.% tin bronze substratum. In order to allow the diffusion of tin into niobium and the formation of the A15 phase, the sample is maintained at about 700/spl deg/C during the deposition, and for several hours after the deposition. A Nb/sub 3/Sn film with very good adhesion on the substratum has been obtained. The RF behaviour of the film has been analyzed at about 10 GHz at temperature near Tc, using a host copper cavity having the top plate substituted with the bronze-Nb/sub 3/Sn sample. Both the quality factor and the frequency shift have been measured.<>
Keywords :
Q-factor; adhesion; electric impedance; niobium alloys; penetration depth (superconductivity); sputter deposition; superconducting cavity resonators; superconducting microwave devices; superconducting thin films; tin alloys; type II superconductors; 10 GHz; 300 to 500 nm; 700 C; A15 phase; CuSn; Nb/sub 3/Sn; Nb/sub 3/Sn thin films; RF behaviour; Sn diffusion; adhesion; bronze process; frequency shift measurement; host copper cavity; impedance measurement; preparation method; quality factor; sputtering technique; Adhesives; Copper; Frequency measurement; Niobium; Q factor; Radio frequency; Sputtering; Temperature; Thin film devices; Tin;
Journal_Title :
Applied Superconductivity, IEEE Transactions on
