DocumentCode :
852980
Title :
Lasers in microelectronics manufacturing: past, present, and future
Volume :
90
Issue :
10
fYear :
2002
Firstpage :
1611
Lastpage :
1613
Keywords :
Circuits; Laser applications; Laser modes; Laser theory; Laser tuning; Manufacturing; Microelectronics; Paper technology; Pulsed laser deposition; Semiconductor lasers;
fLanguage :
English
Journal_Title :
Proceedings of the IEEE
Publisher :
ieee
ISSN :
0018-9219
Type :
jour
DOI :
10.1109/JPROC.2002.803669
Filename :
1043913
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=852980
