DocumentCode
852980
Title
Lasers in microelectronics manufacturing: past, present, and future
Volume
90
Issue
10
fYear
2002
Firstpage
1611
Lastpage
1613
Keywords
Circuits; Laser applications; Laser modes; Laser theory; Laser tuning; Manufacturing; Microelectronics; Paper technology; Pulsed laser deposition; Semiconductor lasers;
fLanguage
English
Journal_Title
Proceedings of the IEEE
Publisher
ieee
ISSN
0018-9219
Type
jour
DOI
10.1109/JPROC.2002.803669
Filename
1043913
Link To Document