Piezoelectric bimorph microphone built on micromachined parylene diaphragm

Author

Niu, Meng-Nian ; Kim, Eun Sok

Author_Institution

Dept. of Electr. Eng., Univ. of Hawaii, Honolulu, HI, USA

Volume

12

Issue

6

fYear

2003

Firstpage

892

Lastpage

898

Abstract

This paper describes a novel bimorph piezoelectric microphone built on a micromachined parylene diaphragm with two ZnO films of opposite c-axis orientations. Both the sensitivity and signal-to-noise ratio (SNR) of the bimorph parylene-diaphragm microphone have been demonstrated to be much higher than those of a conventional unimorph silicon-nitride-diaphragm microphone.

Keywords

II-VI semiconductors; diaphragms; etching; micromachining; microphones; microsensors; organic compounds; piezoelectric transducers; semiconductor thin films; zinc compounds; Rayleigh-Ritz method; ZnO; bimorph piezoelectric microphone; etching; low-pressure chemical vapor deposition; micromachined parylene diaphragm; multilayered plates; opposite c-axis orientation films; photomasks; sensitivity; signal-to-noise ratio; spin-coating; sputtering deposition; transverse-expander piezoelectric films; Acoustic transducers; Electrodes; Fabrication; Microphones; Piezoelectric films; Residual stresses; Signal to noise ratio; Silicon; Weight control; Zinc oxide;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/JMEMS.2003.820288

Filename

1257369