Title :
Piezoelectric bimorph microphone built on micromachined parylene diaphragm
Author :
Niu, Meng-Nian ; Kim, Eun Sok
Author_Institution :
Dept. of Electr. Eng., Univ. of Hawaii, Honolulu, HI, USA
Abstract :
This paper describes a novel bimorph piezoelectric microphone built on a micromachined parylene diaphragm with two ZnO films of opposite c-axis orientations. Both the sensitivity and signal-to-noise ratio (SNR) of the bimorph parylene-diaphragm microphone have been demonstrated to be much higher than those of a conventional unimorph silicon-nitride-diaphragm microphone.
Keywords :
II-VI semiconductors; diaphragms; etching; micromachining; microphones; microsensors; organic compounds; piezoelectric transducers; semiconductor thin films; zinc compounds; Rayleigh-Ritz method; ZnO; bimorph piezoelectric microphone; etching; low-pressure chemical vapor deposition; micromachined parylene diaphragm; multilayered plates; opposite c-axis orientation films; photomasks; sensitivity; signal-to-noise ratio; spin-coating; sputtering deposition; transverse-expander piezoelectric films; Acoustic transducers; Electrodes; Fabrication; Microphones; Piezoelectric films; Residual stresses; Signal to noise ratio; Silicon; Weight control; Zinc oxide;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2003.820288
