DocumentCode :
855509
Title :
Fabrication of thin film diodes using reactive sputtering
Author :
Magill, P.J.
Volume :
51
Issue :
7
fYear :
1963
fDate :
7/1/1963 12:00:00 AM
Firstpage :
1040
Lastpage :
1040
Keywords :
Anodes; Cathodes; Cooling; Counting circuits; Electrodes; Fabrication; Insulation; Semiconductor diodes; Semiconductor films; Sputtering;
fLanguage :
English
Journal_Title :
Proceedings of the IEEE
Publisher :
ieee
ISSN :
0018-9219
Type :
jour
DOI :
10.1109/PROC.1963.2401
Filename :
1444331
Link To Document :
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