Title :
High-resolution electron microscopy: from imaging toward measuring
Author :
Van Aert, Sandra ; Den Dekker, Arnold J. ; van den Bos, A. ; Van Dyck, Dirk
Author_Institution :
Dept. of Appl. Phys., Delft Univ. of Technol., Netherlands
fDate :
8/1/2002 12:00:00 AM
Abstract :
High-resolution electron microscopy is discussed as a measuring, rather than an imaging, technique. It is shown that the interpretation or the images could greatly benefit from a quantitative instead of a qualitative approach accompanied by quantitative statistical experimental design.
Keywords :
design of experiments; electron microscopy; high-resolution electron microscopy; qualitative imaging instrument; quantitative measuring instrument; statistical experimental design; Atomic measurements; Design for experiments; Electron microscopy; High-resolution imaging; Image resolution; Instruments; Material properties; Nanostructured materials; Position measurement; Superconducting materials;
Journal_Title :
Instrumentation and Measurement, IEEE Transactions on
DOI :
10.1109/TIM.2002.802250
