DocumentCode
856226
Title
Displacement sensor based on pyroelectric thick films and contactless light-spot cursor
Author
Ferrari, Vittorio ; Marioli, Daniele ; Taroni, Andrea
Author_Institution
Facolta di Ingegneria, Brescia Univ., Italy
Volume
51
Issue
4
fYear
2002
fDate
8/1/2002 12:00:00 AM
Firstpage
819
Lastpage
823
Abstract
A sensor is presented to measure translational displacement exploiting the position-dependent signals generated by pyroelectric films when excited by a movable light-emitting diode that works as a contactless light-spot cursor. The pyroelectric films are made of lead zirconate titanate (PZT) screen-printed on alumina substrate by the thick-film technology. The sensor employs a differential configuration which minimizes the sensitivity toward mechanical vibrations and microphonics caused by the piezoelectric response of PZT. An electronic circuit based on excitation modulation and synchronous rectification rejects the interference from thermal and light background. The sensor principle, design, and manufacturing are described, and experimental results from the device characterization are reported.
Keywords
demodulation; displacement measurement; lead compounds; light emitting diodes; pyroelectric detectors; thick film devices; thick films; PZT; PbZrO3TiO3; contactless light-spot cursor; differential configuration; displacement sensor; excitation modulation; interference rejection; movable light-emitting diode; planar multilayer structure; position-dependent signals; pyroelectric thick-film sensor; screen-printed thick-film; sensor design; synchronous demodulation; synchronous rectification; translational displacement; Displacement measurement; Light emitting diodes; Mechanical sensors; Piezoelectric films; Position measurement; Pyroelectricity; Signal generators; Thick film sensors; Thick films; Titanium compounds;
fLanguage
English
Journal_Title
Instrumentation and Measurement, IEEE Transactions on
Publisher
ieee
ISSN
0018-9456
Type
jour
DOI
10.1109/TIM.2002.803395
Filename
1044758
Link To Document