• DocumentCode
    856226
  • Title

    Displacement sensor based on pyroelectric thick films and contactless light-spot cursor

  • Author

    Ferrari, Vittorio ; Marioli, Daniele ; Taroni, Andrea

  • Author_Institution
    Facolta di Ingegneria, Brescia Univ., Italy
  • Volume
    51
  • Issue
    4
  • fYear
    2002
  • fDate
    8/1/2002 12:00:00 AM
  • Firstpage
    819
  • Lastpage
    823
  • Abstract
    A sensor is presented to measure translational displacement exploiting the position-dependent signals generated by pyroelectric films when excited by a movable light-emitting diode that works as a contactless light-spot cursor. The pyroelectric films are made of lead zirconate titanate (PZT) screen-printed on alumina substrate by the thick-film technology. The sensor employs a differential configuration which minimizes the sensitivity toward mechanical vibrations and microphonics caused by the piezoelectric response of PZT. An electronic circuit based on excitation modulation and synchronous rectification rejects the interference from thermal and light background. The sensor principle, design, and manufacturing are described, and experimental results from the device characterization are reported.
  • Keywords
    demodulation; displacement measurement; lead compounds; light emitting diodes; pyroelectric detectors; thick film devices; thick films; PZT; PbZrO3TiO3; contactless light-spot cursor; differential configuration; displacement sensor; excitation modulation; interference rejection; movable light-emitting diode; planar multilayer structure; position-dependent signals; pyroelectric thick-film sensor; screen-printed thick-film; sensor design; synchronous demodulation; synchronous rectification; translational displacement; Displacement measurement; Light emitting diodes; Mechanical sensors; Piezoelectric films; Position measurement; Pyroelectricity; Signal generators; Thick film sensors; Thick films; Titanium compounds;
  • fLanguage
    English
  • Journal_Title
    Instrumentation and Measurement, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9456
  • Type

    jour

  • DOI
    10.1109/TIM.2002.803395
  • Filename
    1044758