• DocumentCode
    856729
  • Title

    A 48-turn thin film head for 150 Mb/in2 recording

  • Author

    Ohdoi, Y. ; Morikawa, K. ; Horibata, S. ; Suzuki, S. ; Shibata, H.

  • Author_Institution
    Mitsubishi Electr. Corp., Hyogo, Japan
  • Volume
    26
  • Issue
    5
  • fYear
    1990
  • fDate
    9/1/1990 12:00:00 AM
  • Firstpage
    1671
  • Lastpage
    1673
  • Abstract
    A 48-turn thin-film head has been developed. The copper coils were electroplated through minute resist frames which were fabricated by a reactive ion etching (RIE) process. The problem of the redeposited copper underlayer in the RIE was solved using ECR (electron cyclotron resonance) plasma equipment. The output voltage of the 48-turn head was in proportion to the track width and number of coil turns. With a 6.5-μm track width head, a recording density of 150 Mb/in2 was achieved
  • Keywords
    magnetic heads; magnetic thin film devices; 6.5 micron; Cu coils; electroplated; reactive ion etching; recording density; resist frames; track width; Coils; Copper; Cyclotrons; Electrons; Etching; Magnetic heads; Plasma applications; Resists; Resonance; Transistors;
  • fLanguage
    English
  • Journal_Title
    Magnetics, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9464
  • Type

    jour

  • DOI
    10.1109/20.104487
  • Filename
    104487
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=856729