A fabrication process of thin film head for VCR

Author

Saito, M. ; Miura, M. ; Shibayama, Y. ; Nagatomo, H. ; Saito, S. ; Imai, S.

Author_Institution

Hitachi Ltd., Yokohama, Japan

Volume

26

Issue

5

fYear

1990

fDate

9/1/1990 12:00:00 AM

Firstpage

1686

Lastpage

1688

Abstract

A novel magnetic head with thin-film magnetic yokes and thin-film coils for VCR systems has been developed. The head has 25-μm-thick CoNbZr (B_s=0.9 T) magnetic yokes with round edges. The lower yoke is buried in the groove with a round bottom formed by a combination of photolithographic and mechanical processing, while the upper yoke is formed by ion etching. The head with a 150 μm gap depth has excellent recording performance on high H_c media (H_c=1500 Oe). Its contour-signal level is below -45 dB from the main signal (λ=2.5 μm)

Keywords

cobalt alloys; etching; magnetic heads; magnetic thin film devices; niobium alloys; photolithography; video recording; video tape recorders; zirconium alloys; 15 micron; 25 micron; CoNbZr; VCR systems; contour-signal level; fabrication process; ion etching; magnetic head; mechanical processing; photolithographic processing; recording performance; thin film head; thin-film coils; thin-film magnetic yokes; Coils; Etching; Fabrication; Magnetic films; Magnetic flux; Magnetic heads; Magnetic recording; Saturation magnetization; Transistors; Video recording;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.104492

Filename

104492