Title :
A fabrication process of thin film head for VCR
Author :
Saito, M. ; Miura, M. ; Shibayama, Y. ; Nagatomo, H. ; Saito, S. ; Imai, S.
Author_Institution :
Hitachi Ltd., Yokohama, Japan
fDate :
9/1/1990 12:00:00 AM
Abstract :
A novel magnetic head with thin-film magnetic yokes and thin-film coils for VCR systems has been developed. The head has 25-μm-thick CoNbZr (Bs=0.9 T) magnetic yokes with round edges. The lower yoke is buried in the groove with a round bottom formed by a combination of photolithographic and mechanical processing, while the upper yoke is formed by ion etching. The head with a 150 μm gap depth has excellent recording performance on high Hc media (Hc=1500 Oe). Its contour-signal level is below -45 dB from the main signal (λ=2.5 μm)
Keywords :
cobalt alloys; etching; magnetic heads; magnetic thin film devices; niobium alloys; photolithography; video recording; video tape recorders; zirconium alloys; 15 micron; 25 micron; CoNbZr; VCR systems; contour-signal level; fabrication process; ion etching; magnetic head; mechanical processing; photolithographic processing; recording performance; thin film head; thin-film coils; thin-film magnetic yokes; Coils; Etching; Fabrication; Magnetic films; Magnetic flux; Magnetic heads; Magnetic recording; Saturation magnetization; Transistors; Video recording;
Journal_Title :
Magnetics, IEEE Transactions on
