Sputtered Pt/Co multilayers for magneto-optical recording

Author

Carcia, P.F. ; Zeper, W.B.

Author_Institution

E.I. du Pont de Nemours & Co., Wilmington, DE, USA

Volume

26

Issue

5

fYear

1990

fDate

9/1/1990 12:00:00 AM

Firstpage

1703

Lastpage

1705

Abstract

By sputtering Pt/Co multilayers with either Kr or Xe instead of Ar, a large magnetic coercivity of ~1000 Oe suitable for magnetooptical recording was achieved. Sputtering with a larger-mass gas reduced both the flux and the energy of backreflected gas neutrals, which can mix Pt and Co layers and compromise magnetic properties. Multilayer-related Pt-Co alloys with perpendicular magnetic anisotropy and coercivities of 1-3.5 kOe were made by sputtering them at high Ar pressures (20-50 mTorr)

Keywords

cobalt; cobalt alloys; coercive force; magnetic anisotropy; magnetic thin films; magneto-optical recording; platinum; platinum alloys; sputter deposition; 20 to 50 mtorr; Kr; Pt-Co; Pt-Co alloys; Xe; backreflected gas neutrals; magnetic coercivity; magnetic properties; magnetooptical recording; perpendicular magnetic anisotropy; sputtered multilayers; Argon; Coercive force; Magnetic anisotropy; Magnetic flux; Magnetic multilayers; Magnetic properties; Magnetooptic recording; Perpendicular magnetic anisotropy; Perpendicular magnetic recording; Sputtering;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.104498

Filename

104498