DocumentCode
856986
Title
Plasma-hydrogenated low-threshold wide-band 1.3 mu m buried ridge structure laser
Author
Kazmierski, C. ; Theys, B. ; Rose, B. ; Mircea, A. ; Jalil, Abdul ; Chevallier, J.
Author_Institution
CNET, Bagneux, France
Volume
25
Issue
21
fYear
1989
Firstpage
1433
Lastpage
1435
Abstract
The plasma hydrogenation of p-type InP has been applied to the fabrication of buried ridge structure (BRS) lasers. The threshold current, output power and modulation bandwidth of the obtained devices compare favourably with those of more conventional ones fabricated by proton implantation on the same wafer.
Keywords
III-V semiconductors; diffusion in solids; hydrogen; indium compounds; semiconductor junction lasers; 1.3 micron; InP; buried ridge structure laser; modulation bandwidth; output power; plasma hydrogenation; proton implantation; threshold current;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19890957
Filename
46228
Link To Document