Integrated VCSEL-Microlens Scanner With Large Scan Range

Author

Chou, Jeffrey B. ; Quack, Niels ; Wu, Ming C.

Author_Institution

Massachusetts Inst. of Technol., Cambridge, MA, USA

Volume

23

Issue

6

fYear

2014

fDate

Dec. 2014

Firstpage

1471

Lastpage

1476

Abstract

We present an integrated beam steering system with a microlens scanner and a vertical cavity surface-emitting laser (VCSEL) source. The scanner and the VCSEL are assembled with an alignment sphere process and with an accuracy of 121 ± 7μm defined by precision microspheres. The microlens scanner employs an electrostatic comb-drive actuator with prebent springs to extend the maximum displacement to 83 μm; 60% larger than that with standard folded springs. This translates to an angular scan range of ±9.6° with the double sided comb-drive scanner. The mechanical resonance with lens is measured to be 236 Hz.

Keywords

beam steering; electrostatic actuators; integrated optics; laser cavity resonators; micro-optomechanical devices; microlenses; optical scanners; surface emitting lasers; alignment sphere process; double sided comb-drive scanner; electrostatic comb-drive actuator; integrated VCSEL-microlens scanner; integrated beam steering system; large scan range; mechanical resonance; precision microspheres; vertical cavity surface-emitting laser; Laser beams; Lenses; Micromechanical devices; Microoptics; Optical beams; Springs; Vertical cavity surface emitting lasers; Beam steering; large displacement; optics; packaging; packaging.;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/JMEMS.2014.2315810

Filename

6802335