Title :
Double sided YBCO films on 4" substrates by thermal reactive evaporation
Author :
Kinder, H. ; Berberich, P. ; Utz, B. ; Prusseit, W.
Author_Institution :
Dept. of Phys. E10, Tech. Univ. Munchen, Germany
fDate :
6/1/1995 12:00:00 AM
Abstract :
Homogenous high quality YBa/sub 2/Cu/sub 3/O/sub 7/ films on large substrates are first essentials of the commercialization of HTSC devices. We have employed thermal co-evaporation to deposit YBa/sub 2/Cu/sub 3/O/sub 7/ films up to 4" diameter. The heater design allows intermittent metal deposition and oxidation in spatially separated zones, with the metal deposition in vacuum and the oxidation at 10/sup -2/ mbar. On all substrates from MgO, LaAlO/sub 3/, YSZ, sapphire to Si and GaAs we typically achieved T/sub c/>86 K and j/sub c/>2/spl middot/10/sup 6/. A/cm/sup 2/ over the entire area. The radiation heating allows us to turn the substrates over for double sided coating, On 2" and 3" LaAlO, and on 4" YSZ, both sides meet the above specifications even for thicknesses up to 400 nm.<>
Keywords :
barium compounds; critical current density (superconductivity); high-temperature superconductors; molecular beam epitaxial growth; oxidation; superconducting epitaxial layers; superconducting thin films; superconducting transition temperature; yttrium compounds; 0.01 mbar; 2 in; 3 in; 4 in; 86 K; Al/sub 2/O/sub 3/; GaAs; HTSC devices; LaAlO/sub 3/; MBE growth; MgO; Si; YBa/sub 2/Cu/sub 3/O/sub 7/; YBa/sub 2/Cu/sub 3/O/sub 7/ films; ZrO/sub 2/:Y/sub 2/O/sub 3/; critical current density; double sided coating; double sided films; high temperature superconductors; homogenous high quality films; intermittent metal deposition; molecular beam epitaxy; oxidation; radiation heating; sapphire; spatially separated zones; superconducting transition temperature; thermal reactive evaporation; vacuum deposition; yttria stabilized zirconia; Atomic layer deposition; Commercialization; Magnetic resonance imaging; Magnetic separation; Oxidation; Satellite broadcasting; Substrates; Superconducting coils; Superconducting films; Yttrium barium copper oxide;
Journal_Title :
Applied Superconductivity, IEEE Transactions on
