Title :
Performance assessment of a multi-level repulsive-force out-of-plane microelectrostatic actuator
Author :
He, S. ; Mrad, R.B.
Keywords :
Circuits; Electrodes; Electrostatic actuators; Helium; Microelectromechanical systems; Micromachining; Micromechanical devices; Numerical simulation; Springs; Voltage;
Journal_Title :
Electrical and Computer Engineering, Canadian Journal of
DOI :
10.1109/CJECE.2006.259187
