Title :
Application of twin-beam structures for estimation of material properties and sensor fabrication
Author :
Bahreyni, Behraad ; Shafai, Cyrus
Keywords :
Fabrication; Insulation; Magnetic sensors; Material properties; Mechanical sensors; Microelectromechanical systems; Micromechanical devices; Piezoresistance; Piezoresistive devices; Stress;
Journal_Title :
Electrical and Computer Engineering, Canadian Journal of
DOI :
10.1109/CJECE.2006.259189
