Title :
A high-tuning-range MEMS variable capacitor using carrier beams
Author :
Bakri-Kassem, Maher ; Mansour, Raafat R.
Keywords :
Capacitors; Frequency measurement; Microelectromechanical systems; Micromechanical devices; Polarization; Radio frequency; Springs; Steady-state; Tuning; Voltage;
Journal_Title :
Electrical and Computer Engineering, Canadian Journal of
DOI :
10.1109/CJECE.2006.259190
