Title :
Out-of-plane electrothermal actuators in silicon-on-insulator technology
Author :
Tsang, See-Ho ; Sameoto, Dan ; Parameswaran, M.
Keywords :
Actuators; Assembly; Conductivity; Electrothermal effects; Fasteners; Microactuators; Performance analysis; Silicon on insulator technology; Springs; Testing;
Journal_Title :
Electrical and Computer Engineering, Canadian Journal of
DOI :
10.1109/CJECE.2006.259191
