• DocumentCode
    858317
  • Title

    Out-of-plane electrothermal actuators in silicon-on-insulator technology

  • Author

    Tsang, See-Ho ; Sameoto, Dan ; Parameswaran, M.

  • Volume
    31
  • Issue
    2
  • fYear
    2006
  • Firstpage
    97
  • Lastpage
    103
  • Keywords
    Actuators; Assembly; Conductivity; Electrothermal effects; Fasteners; Microactuators; Performance analysis; Silicon on insulator technology; Springs; Testing;
  • fLanguage
    English
  • Journal_Title
    Electrical and Computer Engineering, Canadian Journal of
  • Publisher
    ieee
  • ISSN
    0840-8688
  • Type

    jour

  • DOI
    10.1109/CJECE.2006.259191
  • Filename
    4028894
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=858317