Title :
Suspended on-chip RF MEMS components fabricated using PolyMUMPs technology
Author :
Fouladi, S. ; Bakri-Kassem, M. ; Mansour, R.R.
Keywords :
Dry etching; Fabrication; Micromachining; Micromechanical devices; Radio frequency; Radiofrequency microelectromechanical systems; Silicon; Substrates; Testing; Wet etching;
Journal_Title :
Electrical and Computer Engineering, Canadian Journal of
DOI :
10.1109/CJECE.2006.259192
