• DocumentCode
    858322
  • Title

    Suspended on-chip RF MEMS components fabricated using PolyMUMPs technology

  • Author

    Fouladi, S. ; Bakri-Kassem, M. ; Mansour, R.R.

  • Volume
    31
  • Issue
    2
  • fYear
    2006
  • Firstpage
    105
  • Lastpage
    109
  • Keywords
    Dry etching; Fabrication; Micromachining; Micromechanical devices; Radio frequency; Radiofrequency microelectromechanical systems; Silicon; Substrates; Testing; Wet etching;
  • fLanguage
    English
  • Journal_Title
    Electrical and Computer Engineering, Canadian Journal of
  • Publisher
    ieee
  • ISSN
    0840-8688
  • Type

    jour

  • DOI
    10.1109/CJECE.2006.259192
  • Filename
    4028895
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=858322