Title :
Materials Optimization for Magnetic MEMS
Author_Institution :
Dept. of Eng. Mater., Univ. of Sheffield
fDate :
6/1/2007 12:00:00 AM
Abstract :
By highlighting magnetomechanical effects such as the DeltaE-effect, and developing modeling code that integrates magnetoelasticity with microelectromechanical systems, it is shown that a simple cantilever system can have a sensitivity to mass loading at the attogram level. The requirements on the magnetoelastic materials for such devices are described, and progress towards achieving optimized material is reviewed. The possibility for deployment of such systems in security, healthcare, and bioscience is outlined
Keywords :
cantilevers; magnetoelastic effects; magnetostrictive devices; micromechanical devices; cantilever system; magnetic MEMS; magnetoelasticity; magnetomechanical effects; microelectromechanical systems; Biological materials; Magnetic films; Magnetic materials; Magnetostriction; Magnetostrictive devices; Microelectromechanical systems; Micromechanical devices; Permeability; Saturation magnetization; Structural beams; Magnetic layered films; magnetostrictive devices; microelectromechanical devices;
Journal_Title :
Magnetics, IEEE Transactions on
DOI :
10.1109/TMAG.2007.893764
