Title :
Heating of large-area substrates for in situ deposition of YBCO
Author :
Drehman, A.J. ; Derov, J.S. ; Horrigan, J.A. ; Andrews, R.J. ; Linden, D.S.
Author_Institution :
Rome Lab., Hanson AFB, MA, USA
fDate :
6/1/1995 12:00:00 AM
Abstract :
We have developed a radiant technique for substrate heating which we found particularly useful for the in situ deposition of high temperature superconducting films. Using this technique, large area YBa/sub 2/Cu/sub 3/O/sub x/ films were deposited, using off-axis sputter deposition, onto lanthanum aluminate and sapphire substrates, the latter using an yttria-stabilized zirconia buffer layer. For both types of substrates we were able to obtain c-axis oriented films. The DC and microwave properties of the films deposited on lanthanum aluminate are presented along with the DC measurements of the films deposited on sapphire. The motivation for employing this method of heating are discussed, along with our current plans for scaling up the process to produce even larger area films.<>
Keywords :
barium compounds; critical current density (superconductivity); electrical conductivity; electromagnetic waves; heat treatment; high-temperature superconductors; sputter deposition; superconducting thin films; superconducting transition temperature; yttrium compounds; Al/sub 2/O/sub 3/; DC properties; LaAlO/sub 3/; LaAlO/sub 3/ substrates; Y/sub 2/O/sub 3/ZrO/sub 2/-Al/sub 2/O/sub 3/; YBa/sub 2/Cu/sub 3/O/sub 7/; YBa/sub 2/Cu/sub 3/O/sub x/ large-area films; YSZ buffer layer; critical current density; critical temperature; microwave properties; sapphire substrates; sputter deposition; substrate heating; Buffer layers; Dielectric substrates; Electromagnetic heating; High temperature superconductors; Lanthanum; Sputtering; Superconducting epitaxial layers; Superconducting films; Superconducting microwave devices; Yttrium barium copper oxide;
Journal_Title :
Applied Superconductivity, IEEE Transactions on
