Determination of the complex permittivity of packaging materials at millimeter-wave frequencies

The focus of this paper is the determination of the complex permittivity of chip packaging materials at millimeter-wave frequencies. After a broad overview of existing measurement techniques, three methods will be presented that have been established for the dielectric property determination of substrate, as well as mold materials (encapsulants, under-fill, etc.) in the millimeter-wave frequency range. First, the open resonator used here will be briefly described. It allows accurate determination of the dielectric constant and loss of thin sheet substrate materials from below 20 GHz to above 100 GHz. Second, a filled waveguide method is explained in detail. The setup used here can determine the complex dielectric properties of mold materials from 70 to 100 GHz. Third, the method based on covered transmission lines will be described in detail. The used lines allow measurements from below 40 GHz to approximately 90 GHz. Verification of all three methods will be provided by inter-comparison and comparison to values from the literature. Additionally, results for several typical substrate and mold materials that are available for millimeter-wave packaging will be shown and discussed.