Title :
Particle-in-cell simulation of the pulsed sheath in a trench
Author_Institution :
Dept. of Phys., West Virginia Univ., Morgantown, WV, USA
fDate :
2/1/1996 12:00:00 AM
Abstract :
Ion dynamics in and around a plasma-filled rectangular trench are studied using a two-dimensional (2-D) particle-in-cell simulation. It is found that ion loops form in the trench as ions transit the plasma sheath. These loops correspond to the traveling ion density pulse seen in a previous fluid simulation (Sheridan)
Keywords :
ion density; plasma density; plasma sheaths; plasma simulation; ion dynamics; ion loops; plasma-filled rectangular trench; pulsed sheath; traveling ion density pulse; two-dimensional particle-in-cell simulation; Acceleration; Fluid dynamics; Ion implantation; Plasma accelerators; Plasma density; Plasma immersion ion implantation; Plasma sheaths; Plasma simulation; Plasma temperature; Two dimensional displays;
Journal_Title :
Plasma Science, IEEE Transactions on
