Two-dimensional imaging of laser-induced fluorescence: OH in a plasma-generated molecular beam scattering from a silicon surface

Author

Buss, Richard J. ; Ho, Pauline

Author_Institution

Sandia Nat. Labs., Albuquerque, NM, USA

Volume

24

Issue

1

fYear

1996

fDate

2/1/1996 12:00:00 AM

Firstpage

79

Lastpage

80

Abstract

Two-dimensional (2-D) imaging is a significant improvement to the IRIS (imaging of radicals interacting with surfaces) technique for measuring the reactivity of plasma-generated radicals at surfaces. Several interesting phenomena resulting from the effects of saturation of the optical transition and of molecular translation during the radiative lifetime of OH have now been observed directly

Keywords

fluorescence; free radical reactions; free radicals; molecular beams; molecule-surface impact; oxygen compounds; plasma applications; plasma diagnostics; radiative lifetimes; silicon; surface chemistry; OH; Si; Si surface; imaging of radicals interacting with surfaces technique; laser-induced fluorescence; molecular translation; optical transition; plasma-generated molecular beam scattering; plasma-generated radicals reactivity; radiative lifetime; two-dimensional imaging; Fluorescence; Iris; Optical imaging; Plasma applications; Plasma chemistry; Plasma materials processing; Plasma measurements; Plasma simulation; Silicon; Substrates;

fLanguage

English

Journal_Title

Plasma Science, IEEE Transactions on

Publisher

ieee

ISSN

0093-3813

Type

jour

DOI

10.1109/27.491700

Filename

491700