Title :
Two-dimensional imaging of laser-induced fluorescence: OH in a plasma-generated molecular beam scattering from a silicon surface
Author :
Buss, Richard J. ; Ho, Pauline
Author_Institution :
Sandia Nat. Labs., Albuquerque, NM, USA
fDate :
2/1/1996 12:00:00 AM
Abstract :
Two-dimensional (2-D) imaging is a significant improvement to the IRIS (imaging of radicals interacting with surfaces) technique for measuring the reactivity of plasma-generated radicals at surfaces. Several interesting phenomena resulting from the effects of saturation of the optical transition and of molecular translation during the radiative lifetime of OH have now been observed directly
Keywords :
fluorescence; free radical reactions; free radicals; molecular beams; molecule-surface impact; oxygen compounds; plasma applications; plasma diagnostics; radiative lifetimes; silicon; surface chemistry; OH; Si; Si surface; imaging of radicals interacting with surfaces technique; laser-induced fluorescence; molecular translation; optical transition; plasma-generated molecular beam scattering; plasma-generated radicals reactivity; radiative lifetime; two-dimensional imaging; Fluorescence; Iris; Optical imaging; Plasma applications; Plasma chemistry; Plasma materials processing; Plasma measurements; Plasma simulation; Silicon; Substrates;
Journal_Title :
Plasma Science, IEEE Transactions on
