Ku-band antenna array feed distribution network with ferroelectric phase shifters on silicon

This paper presents the design, fabrication, and experimental results of a 1 : 4 monolithic power distribution network for Ku-band array antenna applications. The network integrated on a high-resistivity silicon (HRS) substrate surface stabilized by polysilicon consists of three Wilkinson power dividers, four dc blocking filters, and four coplanar waveguide (CPW)-to-microstrip (MS) transitions. Each output ports are fed with a barium-strontium-titanate phase shifter. It is found that the introduction of the polysilicon layer between the oxide and HRS reduces RF losses significantly, which will enable the monolithic integration of high-power controller modules onto silicon because of the existence of the oxide layer, preventing any degradation of RF performances. The individual components show insertion losses ranging from 0.4 to 2.6 dB at 15 GHz, and the interconnecting CPW lines result in a loss of 0.064 dB/mm. This network was successfully integrated with MS patch antennas monolithically, showing good performance of 32-dB return loss at 14.85 GHz, and 10° beam-steering capability.