DocumentCode
859960
Title
Evolution of a particulate cloud in an RF plasma
Author
Praburam ; Goree
Author_Institution
Dept. of Phys., Iowa Univ., Iowa City, IA, USA
Volume
24
Issue
1
fYear
1996
fDate
2/1/1996 12:00:00 AM
Firstpage
97
Lastpage
98
Abstract
Video images of a cloud of carbon particulates grown in an RF sputtering plasma show a cyclic process of cloud growth, instability, and collapse
Keywords
carbon; plasma production; sputtering; video recording; C; C particulate cloud evolution; RF sputtering plasma; collapse; cyclic process; instability; video images; Clouds; Dusty plasma; Electrodes; Light scattering; Particle scattering; Plasma accelerators; Plasma materials processing; Plasma sheaths; Plasma simulation; Radio frequency;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/27.491710
Filename
491710
Link To Document