DocumentCode
860055
Title
Two-dimensional images of CF2 density in CF4/Ar plasmas by laser-induced fluorescence in a GEC RF reference cell
Author
McMillin, Brian K. ; Zachariah, Michael R.
Author_Institution
Lam Res. Corp., Fremont, CA, USA
Volume
24
Issue
1
fYear
1996
fDate
2/1/1996 12:00:00 AM
Firstpage
113
Lastpage
114
Abstract
Spatially resolved two-dimensional (2-D) maps of the relative CF 2 density in low-pressure CF4/Ar RF discharges, generated within a parallel-plate gaseous electronics conference (GEC) reference reactor, have been obtained using planar laser-induced fluorescence imaging (PLIF). The results illustrate the changes in CF 2 density and distribution in the central plane of the discharge region as flowrate is varied over 10-100 sccm at constant power and pressure, and as pressure is varied over 13.3-133.3 Pa at constant flowrate and power
Keywords
argon; fluorescence; high-frequency discharges; organic compounds; plasma density; plasma diagnostics; plasma pressure; 13.3 to 133.3 Pa; GEC RF reference cell; RF discharges; constant power; constant pressure; difluoromethylene density; flowrate; laser-induced fluorescence; parallel-plate gaseous electronics conference reference reactor; spatially resolved two-dimensional maps; tetrafluoromethane/Ar plasmas; two-dimensional images; Argon; Electrodes; Etching; Fluorescence; Gas lasers; Image resolution; Plasma applications; Plasma density; Radio frequency; Spatial resolution;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/27.491738
Filename
491738
Link To Document