DocumentCode
860084
Title
Two-dimensional analysis of radio frequency discharges
Author
Meyyappan, M. ; Govindan, T.R.
Author_Institution
Sci. Res. Assoc. Inc., Glastonbury, CT, USA
Volume
24
Issue
1
fYear
1996
fDate
2/1/1996 12:00:00 AM
Firstpage
119
Lastpage
120
Abstract
A two-dimensional (2-D) model for the charged particle transport in radio frequency capacitively coupled discharges is presented. The model consists of the three moments of the Boltzmann equation with rate constants for inelastic processes from a zero-dimensional Boltzmann solver. Variation of electron density, potential, and excitation rates inside the reactor is presented and discussed for an argon discharge
Keywords
Boltzmann equation; argon; electron density; high-frequency discharges; plasma density; plasma diagnostics; plasma transport processes; Ar; Ar discharge; Boltzmann equation; charged particle transport; electron density; excitation rates; inelastic processes; potential; radio frequency capacitively coupled discharges; rate constants; two-dimensional analysis; zero-dimensional Boltzmann solver; Argon; Boltzmann equation; Electrodes; Electrons; Fault location; Inductors; Plasma density; Plasma temperature; Poisson equations; Radio frequency;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/27.491741
Filename
491741
Link To Document