Modeling an inductively coupled plasma reactor with chlorine chemistry

Inductively coupled plasma reactors are now one of the most important of the high-density plasma processing tools that have been developed in recent years. We present results from a two-dimensional (2-D) time-dependent fluid model of a chlorine plasma discharge. The steady-state values for the plasma potential, and the ion fluxes for Cl ₂⁺ and Cl^- are shown for a simulation of the Lawrence Livermore National Laboratory (LLNL) large area inductively coupled reactor experiment. The counter streaming of positive and negative ions is evident. The flux of Cl₂⁺ is highly uniform over the lower surface of the reactor