• DocumentCode
    860210
  • Title

    Ultrasonic experiments with lead zirconate titanate thin films fabricated by sol gel processing

  • Author

    Yi, Guanli ; Wu, Zhisheng ; Sreenivas, K. ; Sayer, M. ; Jen, C.K. ; Perluzzo, G.

  • Author_Institution
    Dept. of Phys., Queen´s Univ., Kingston, Ont., Canada
  • Volume
    25
  • Issue
    5
  • fYear
    1989
  • fDate
    3/2/1989 12:00:00 AM
  • Firstpage
    307
  • Lastpage
    309
  • Abstract
    Surface and bulk acoustic wave measurements with lead zirconate titanate (PZT) thin films fabricated by a sol gel processing technique are reported for the first time. The piezoelectricity of such films was achieved by poling. Good acoustic properties of these films are confirmed by the acoustic images and V(z) curves obtained by a scanning acoustic microscope.
  • Keywords
    acoustic microscopy; lead compounds; sol-gel processing; surface acoustic waves; ultrasonic transducers; PZT; PbZrO3TiO3; SAW; US; acoustic images; acoustic properties; bulk acoustic wave measurements; piezoelectricity; poling; scanning acoustic microscope; sol gel processing technique;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19890214
  • Filename
    19732