Title :
Ultrasonic experiments with lead zirconate titanate thin films fabricated by sol gel processing
Author :
Yi, Guanli ; Wu, Zhisheng ; Sreenivas, K. ; Sayer, M. ; Jen, C.K. ; Perluzzo, G.
Author_Institution :
Dept. of Phys., Queen´s Univ., Kingston, Ont., Canada
fDate :
3/2/1989 12:00:00 AM
Abstract :
Surface and bulk acoustic wave measurements with lead zirconate titanate (PZT) thin films fabricated by a sol gel processing technique are reported for the first time. The piezoelectricity of such films was achieved by poling. Good acoustic properties of these films are confirmed by the acoustic images and V(z) curves obtained by a scanning acoustic microscope.
Keywords :
acoustic microscopy; lead compounds; sol-gel processing; surface acoustic waves; ultrasonic transducers; PZT; PbZrO3TiO3; SAW; US; acoustic images; acoustic properties; bulk acoustic wave measurements; piezoelectricity; poling; scanning acoustic microscope; sol gel processing technique;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19890214