DocumentCode :
860210
Title :
Ultrasonic experiments with lead zirconate titanate thin films fabricated by sol gel processing
Author :
Yi, Guanli ; Wu, Zhisheng ; Sreenivas, K. ; Sayer, M. ; Jen, C.K. ; Perluzzo, G.
Author_Institution :
Dept. of Phys., Queen´s Univ., Kingston, Ont., Canada
Volume :
25
Issue :
5
fYear :
1989
fDate :
3/2/1989 12:00:00 AM
Firstpage :
307
Lastpage :
309
Abstract :
Surface and bulk acoustic wave measurements with lead zirconate titanate (PZT) thin films fabricated by a sol gel processing technique are reported for the first time. The piezoelectricity of such films was achieved by poling. Good acoustic properties of these films are confirmed by the acoustic images and V(z) curves obtained by a scanning acoustic microscope.
Keywords :
acoustic microscopy; lead compounds; sol-gel processing; surface acoustic waves; ultrasonic transducers; PZT; PbZrO3TiO3; SAW; US; acoustic images; acoustic properties; bulk acoustic wave measurements; piezoelectricity; poling; scanning acoustic microscope; sol gel processing technique;
fLanguage :
English
Journal_Title :
Electronics Letters
Publisher :
iet
ISSN :
0013-5194
Type :
jour
DOI :
10.1049/el:19890214
Filename :
19732
Link To Document :
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