Development and Evaluation of an Active Magnetic Guide for Microsystems With an Integrated Air Gap Measurement System

Author

Ruffert, Christine ; Li, Jixiang ; Denkena, Berend ; Gatzen, Hans H.

Author_Institution

Inst. for Microtechnoloy, Leibniz Univ. Hannover

Volume

43

Issue

6

fYear

2007

fDate

6/1/2007 12:00:00 AM

Firstpage

2716

Lastpage

2718

Abstract

An active magnetic levitation system based on repulsive magnetic forces was developed as a guide for a linear hybrid microstep motor. With this levitation system, the vertical force, which is typically an order of magnitude greater than the driving force, can be compensated. A capacitive measurement system provides measurement data to maintaining a constant air gap. This paper presents the design, fabrication, and first measurement results of the magnetic guide and the air gap measurement sensor

Keywords

linear motors; magnetic forces; magnetic levitation; micromotors; stepping motors; active magnetic guide; active magnetic levitation; air gap measurement systems; linear hybrid microstep motor; repulsive magnetic forces; Coils; Fabrication; Force sensors; Magnetic field measurement; Magnetic levitation; Magnetic separation; Microactuators; Micromotors; Permanent magnets; Stators; Electromagnetic drive; linear micromotor; magnetic levitation; microassembly;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/TMAG.2007.893779

Filename

4202894