DocumentCode :
860897
Title :
Oxygen Content and Magnetic Properties of SrRuO 
Thin Films
Author :
Sakai, Joe ; Ito, Nobuaki ; Ito, Shin-Ichi ; Takahashi, Kenji ; Funakubo, Hiroshi
Author_Institution :
Sch. of Mater. Sci., Japan Adv. Inst. of Sci. & Technol., Ishikawa
Volume :
43
Issue :
6
fYear :
2007
fDate :
6/1/2007 12:00:00 AM
Firstpage :
3073
Lastpage :
3075
Abstract :
SrRuO3-delta (SRO) films were deposited on SrTiO3 substrates by an RF magnetron sputtering method and post-annealed in various conditions, and the relationship between their oxygen content, crystallinity, and the magnetic properties was studied. Oxygen content of SRO thin films was evaluated by a non-Rutherford elastic resonance scattering (NRERS) method. It was clarified for the present films that the coercivity does not depend on oxygen stoichiometry but depends on the existence of precipitates of ~10-nm size. We conclude that a high temperature annealing process urges the SRO film species to form grains of rather large size, which is the origin of a large coercivity. It was revealed that coercivity and conductivity of SRO films can be controlled independently by changing the annealing conditions
Keywords :
annealing; coercive force; electrical conductivity; ferromagnetic materials; magnetic thin films; precipitation; sputter deposition; stoichiometry; strontium compounds; RF magnetron sputtering method; SrRuO3-delta; SrTiO3; coercivity; conductivity; crystallinity; high temperature annealing process; magnetic thin films; nonRutherford elastic resonance scattering; oxygen content; oxygen stoichiometry; precipitation; Annealing; Coercive force; Crystallization; Magnetic films; Magnetic properties; Magnetoelasticity; Oxygen; Radio frequency; Sputtering; Substrates; Coercive force; non-Rutherford elastic resonance scattering (NRERS); ruthenium compounds; thin films;
fLanguage :
English
Journal_Title :
Magnetics, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9464
Type :
jour
DOI :
10.1109/TMAG.2007.892569
Filename :
4202896
Link To Document :
