Title :
Electrothermal frequency tuning of a nano-resonator
Author :
Jun, S.C. ; Huang, X.M.H. ; Hone, J.
Author_Institution :
Dept. of Mech. Eng., Columbia Univ., New York, NY
Abstract :
Electrothermal tuning of nanomechanical silicon carbide resonators has been demonstrated. The detected mechanical resonance of the untuned resonator was 10.12 MHz and has a quality factor of about 2000 as measured using the magnetomotive transduction technique. Also, the resonance frequency was tuned by 10% with Joule heating of DC current
Keywords :
Q-factor; micromechanical resonators; silicon compounds; tuning; wide band gap semiconductors; 10.12 MHz; DC current Joule heating; NEMS; SiC; electrothermal tuning; magnetomotive transduction; mechanical resonance; nanomechanical resonator; quality factor;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20062883
