• DocumentCode
    861819
  • Title

    Metal Grating Patterning on Fiber Facets by UV-Based Nano Imprint and Transfer Lithography Using Optical Alignment

  • Author

    Scheerlinck, Stijn ; Dubruel, Peter ; Bienstman, Peter ; Schacht, Etienne ; Van Thourhout, Dries ; Baets, Roel

  • Volume
    27
  • Issue
    10
  • fYear
    2009
  • fDate
    5/15/2009 12:00:00 AM
  • Firstpage
    1415
  • Lastpage
    1420
  • Abstract
    UV-based nano imprint and transfer lithography (NITL) is proposed as a flexible, low cost and versatile approach for defining sub-micron metal patterns on optical fiber facets in a single-processing step. NITL relies on a specially prepared mold carrying the pattern that is to be transferred to the facet. The fiber´s light-guiding properties allow control of the position of the metal structures by optical alignment.
  • Keywords
    Biomedical optical imaging; Fiber gratings; Lithography; Nanostructures; Optical device fabrication; Optical devices; Optical fibers; Optical materials; Optical scattering; Optical sensors; Alignment; gold grating; nano imprint lithography; optical fiber; silicon-on-insulator;
  • fLanguage
    English
  • Journal_Title
    Lightwave Technology, Journal of
  • Publisher
    ieee
  • ISSN
    0733-8724
  • Type

    jour

  • DOI
    10.1109/JLT.2008.2004955
  • Filename
    4918988
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=861819