Title :
Metal Grating Patterning on Fiber Facets by UV-Based Nano Imprint and Transfer Lithography Using Optical Alignment
Author :
Scheerlinck, Stijn ; Dubruel, Peter ; Bienstman, Peter ; Schacht, Etienne ; Van Thourhout, Dries ; Baets, Roel
fDate :
5/15/2009 12:00:00 AM
Abstract :
UV-based nano imprint and transfer lithography (NITL) is proposed as a flexible, low cost and versatile approach for defining sub-micron metal patterns on optical fiber facets in a single-processing step. NITL relies on a specially prepared mold carrying the pattern that is to be transferred to the facet. The fiber´s light-guiding properties allow control of the position of the metal structures by optical alignment.
Keywords :
Biomedical optical imaging; Fiber gratings; Lithography; Nanostructures; Optical device fabrication; Optical devices; Optical fibers; Optical materials; Optical scattering; Optical sensors; Alignment; gold grating; nano imprint lithography; optical fiber; silicon-on-insulator;
Journal_Title :
Lightwave Technology, Journal of
DOI :
10.1109/JLT.2008.2004955
