Fabrication of high quality, deep-submicron Nb/AlO/sub x//Nb Josephson junctions using chemical mechanical polishing

Author

Bao, Z. ; Bhushan, M. ; Siyuan Ran ; Lukens, J.E.

Author_Institution

Dept. of Phys., State Univ. of New York, Stony Brook, NY, USA

Volume

5

Issue

2

fYear

1995

fDate

6/1/1995 12:00:00 AM

Firstpage

2731

Lastpage

2734

Abstract

A reliable process based on Chemical Mechanical Polishing (CMP) has been developed for the fabrication of high quality, deep-submicron Nb/AlO/sub x//Nb Josephson junctions on 2 inch wafers. The Nb counter electrode is defined using low pressure SF/sub 6/ reactive ion etching (RIE) with a mask of SiO, which is thermally evaporated through a bilayer resist stencil patterned by electron beam lithography. After RIE, the entire wafer is coated with SiO, which is then planarized using CMP (which also removes the etch mask) to expose the counter electrode. This technique has produced high quality (V/sub m//spl sime/60 mV for J/sub c/ of 2 kA/cm/sup 2/) junctions with areas as small as 0.003 /spl mu/m/sup 2/ demonstrating that the process does not degrade the junction quality. Junctions with critical currents of 22 /spl mu/A and areas of 0.006 /spl mu/m/sup 2/ have been fabricated from trilayers with J/sub c/>300 kA/cm/sup 2/.<>

Keywords

Josephson effect; aluminium compounds; critical currents; electron beam lithography; niobium; polishing; sputter deposition; sputter etching; superconducting device testing; superconducting junction devices; 2 in; 22 muA; 60 mV; DC magnetron sputtering; Josephson junction fabrication; Nb counter electrode; Nb-AlO-Nb; SF/sub 6/; SiO; SiO mask; bilayer resist stencil; chemical mechanical polishing; critical currents; deep-submicron Nb/AlO/sub x//Nb Josephson junctions; electron beam lithography; low pressure SF/sub 6/ reactive ion etching; thermal evaporation; trilayers; Chemical processes; Counting circuits; Electrodes; Electron beams; Etching; Fabrication; Josephson junctions; Niobium; Resists; Thermal resistance;

fLanguage

English

Journal_Title

Applied Superconductivity, IEEE Transactions on

Publisher

ieee

ISSN

1051-8223

Type

jour

DOI

10.1109/77.403155

Filename

403155