Thin film cloth-structured inductor for magnetic integrated circuit

A thin-film cloth-structured inductor for MAGIC (magnetic integrated circuit) operation in the high-frequency range is described. To achieve high inductance in a small area, magnetic core arrays with low demagnetizing factor are utilized. To increase the frequency, which is limited by the resonant frequency, the magnetic-strip core arrays are divided into three parts and each core array is excited out of phase; that is, the inductor is composed of three unit inductors connected in series with low mutual coupling. Thus, the resonant frequency of the integrated inductor is high, and high-frequency operation is possible. The experimental inductor is 3×3 mm² in size. The inductance is about 300 nH at 100 MHz, which is about eight times as large as that of the air-core inductor. High inductance can be easily achieved by increasing the number of strip cores with high permeability