Title :
Comment, on "A 1/f noise technique to extract the oxide trap density near the conduction band edge of silicon" [with reply]
Author :
Surya, Charles ; Hsiang, T.Y. ; Gross, B.J. ; Jayaraman, R. ; Sodini, Charlie G.
Author_Institution :
Dept. of Electr. & Comput. Eng., Northeastern Univ., Boston, MA, USA
fDate :
3/1/1993 12:00:00 AM
Abstract :
For the original article see ibid., vol.36, no.9, p.1773-82 (1989). The commenters show that, contrary to the calculations in the above-titled paper by R. Jayaraman and C.G. Sodini, the correlated noise power spectra of number and surface mobility fluctuations in n-channel MOSFETs are functions of the relative densities of the positive and neutral traps at the Si-SiO/sub 2/ interface. The authors, along with B.J. Gross, disagree with the commenters´ assessment and support their calculations. The contend that the distribution of active traps assumed by the commenters is not representative of the distribution active in real MOSFET devices.<>
Keywords :
carrier mobility; conduction bands; electron traps; elemental semiconductors; hole traps; insulated gate field effect transistors; random noise; semiconductor device noise; silicon; 1/f noise technique; Si; Si-SiO/sub 2/ interface; active traps; conduction band edge; correlated noise power spectra; n-channel MOSFETs; neutral traps; oxide trap density; positive traps; surface mobility fluctuations; 1f noise; Electron mobility; Electron traps; Equations; Fluctuations; Fourier transforms; Interface states; Low-frequency noise; MOSFET circuits; Scattering;
Journal_Title :
Electron Devices, IEEE Transactions on