Title :
Pressure transducer with Au-Ni thin-film strain gauges
Author :
Rajanna, K. ; Mohan, S. ; Nayak, M.M. ; Gunasekaran, N. ; Muthunayagam, A.E.
Author_Institution :
Instrum. & Services Unit, Indian Inst. of Sci., Bangalore, India
fDate :
3/1/1993 12:00:00 AM
Abstract :
The behavior of a pressure transducer with Au-Ni (89:11) film as strain gauges has been studied. The effects of postdeposition heat treatment on the resistance of the thin-film strain gauges and hence the output performance of the pressure transducer are discussed. The effect of a repeated number of pressure cycles carried out over a period of eight months has also been reported. The maximum nonlinearity and the hysteresis is improved from 0.92% FSO to 0.06% FSO after 1000 pressure cycles. The output behavior of the pressure transducer with temperature has also been studied
Keywords :
gold alloys; metallic thin films; nickel alloys; pressure transducers; strain gauges; thin film devices; Au-Ni alloys; Au-Ni thin-film strain gauges; effects of postdeposition heat treatment; hysteresis; nonlinearity; output behavior; output performance; pressure cycles number effect; pressure transducer; resistance; temperature effect; Assembly; Bonding; Capacitive sensors; Fabrication; Heat treatment; Insulation; Resistance heating; Temperature sensors; Transducers; Transistors;
Journal_Title :
Electron Devices, IEEE Transactions on
