Distributed performance evaluation of a controlled IC fab

Integrated circuit (IC) foundry fabs are difficult to model due to the increasing product mixes and flexible routes. An imprecise fab model cannot be used to evaluate fab performance or estimate product cycle time. The distributed colored timed Petri net (DCTPN) is a type of high-level Petri net with embedded entity attribute, time, communication, and remote object invocation properties that contribute to realistic descriptions, distributed modeling, and manufacturing execution system integration. Furthermore, the resource-oriented DCTPN modeling extends product mix and flexible route modeling capabilities. The DCTPN conflict resolution and token competition rules are used to construct the dispatching system for a controlled IC fab. A simplified 200 mm IC fab with six functional areas is discussed and demonstrated based on different control policies.