Title :
Distributed performance evaluation of a controlled IC fab
Author :
Kuo, Chung-Hsien ; Huang, Han-Pang
Author_Institution :
Dept. of Mech. Eng., Nat. Taiwan Univ., Taiwan
Abstract :
Integrated circuit (IC) foundry fabs are difficult to model due to the increasing product mixes and flexible routes. An imprecise fab model cannot be used to evaluate fab performance or estimate product cycle time. The distributed colored timed Petri net (DCTPN) is a type of high-level Petri net with embedded entity attribute, time, communication, and remote object invocation properties that contribute to realistic descriptions, distributed modeling, and manufacturing execution system integration. Furthermore, the resource-oriented DCTPN modeling extends product mix and flexible route modeling capabilities. The DCTPN conflict resolution and token competition rules are used to construct the dispatching system for a controlled IC fab. A simplified 200 mm IC fab with six functional areas is discussed and demonstrated based on different control policies.
Keywords :
Petri nets; industrial control; integrated circuit manufacture; parameter estimation; semiconductor device manufacture; IC foundry fab; conflict resolution; controlled IC fab; cycle time estimation; dispatching system; distributed colored timed Petri net; distributed performance evaluation; integrated circuit; manufacturing execution system; semiconductor manufacturing; token competition rule; Dispatching; Foundries; Integrated circuit manufacture; Integrated circuit modeling; Manufacturing systems; Mechanical engineering; Power system modeling; Robotics and automation; Semiconductor device manufacture; Sputter etching;
Journal_Title :
Robotics and Automation, IEEE Transactions on
DOI :
10.1109/TRA.2003.819720
