Title :
A low-cost, smart capacitive position sensor
Author :
Toth, Ferry N. ; Meijer, Gerard C M
Author_Institution :
Dept. of Electr. Eng., Delft Univ. of Technol., Netherlands
fDate :
12/1/1992 12:00:00 AM
Abstract :
A high-performance, low-cost, capacitive position-measuring system is described. By using a highly linear oscillator, shielding and a three-signal approach, most of the errors are eliminated. The accuracy amounts to 1 μm over a 1 mm range. Since the output of the oscillator can directly be connected to a microcontroller, an A/D converter is not needed
Keywords :
electric sensing devices; intelligent sensors; position measurement; A/D converter; displacement sensor; intelligent sensor; linear oscillator; microcontroller; shielding; smart capacitive position sensor; three signal method; Capacitive sensors; Costs; Displacement measurement; Electrodes; Intelligent sensors; Microcontrollers; Oscillators; Parasitic capacitance; Time measurement; Transducers;
Journal_Title :
Instrumentation and Measurement, IEEE Transactions on
